论文部分内容阅读
利用氟化氪(KrF)脉冲准分子激光烧蚀沉积(PLD)技术,通过对激光等离子体的粒子成分以及空间分布的诊断,实现了等离子体成分的选择性沉积。在不降低光谱范围和透过率指标的前提下,解决了类金刚石(DLC)薄膜和硫化锌(ZnS)基底的牢固结合问题;通过改进基底平台的扫描方式,在激光烧蚀沉积工艺中沉积了80mm的大面积均匀类金刚石薄膜。制备的类金刚石/ZnS镀膜样品,光谱范围为0.53~12μm,其中1.3~11μm波段透过率在70%以上,膜层均匀性优于95%,可耐受环境湿度95%~100%,工作温度-45~85℃,附着力达到国军标要求。研究表明,利用类金刚石薄膜可以明显提高ZnS材料的耐冲击、耐高温、耐辐射和抗沙粒、盐、雾和尘埃的磨损侵蚀等能力。
The KrF pulsed excimer laser ablation deposition (PLD) technique is used to realize the selective deposition of plasma components by the particle composition and spatial distribution of the laser plasma. The problem of strong bonding between the DLC film and the zinc sulfide (ZnS) substrate is solved without degrading the spectral range and the transmittance index. The deposition of the DLC film in the laser ablation deposition process is improved by improving the scanning mode of the substrate platform. 80mm large area uniform diamond-like film. The prepared diamond / ZnS coating has a spectral range of 0.53 ~ 12μm, of which the transmittance in the wavelength band of 1.3 ~ 11μm is above 70%, the uniformity of the film is better than 95%, the environmental humidity can be tolerated to 95% ~ 100% Temperature -45 ~ 85 ℃, the adhesion reached the national standard requirements. Research shows that the use of diamond-like carbon films can significantly improve the impact resistance, high temperature resistance, radiation resistance and abrasion resistance of sand, salt, fog and dust of ZnS materials.