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扫描电子声显微镜是近几年国际上发展起来的一种新型的显微观察与成像工具，由于它的成像机理与以往的扫描电镜完全不同，特别是它能进行非破坏性的揭示样品亚表面特性的能力，因此，正越来越多的受到人们的重视与研究．本文主要介绍了扫描电子声显微镜的发展历史，简述了电子声成像技术的基本工作原理．对电子声成像的热波理论、过剩载流子理论、压电耦合理论和磁耦合理论四种成像机理进行了较为详细的分析归纳，并指出了其适用范围．显示了电子声成像技术在金属材料，半导体材料及陶瓷材料中的应用．最后展望了电子产成像理论、技术及应用的发展趋势．
Scanning electronic sound microscope is a new type of microscopic observation and imaging tool developed internationally in recent years. Because of its imaging mechanism completely different from the previous scanning electron microscope, it can not only nondestructively reveal the subsurface of the sample Therefore, more and more people are paying attention to and researching. This article mainly introduces the development history of scanning electronic sound microscope, and briefly describes the basic working principle of electronic sound imaging technology. Four kinds of imaging mechanisms of electronic sound imaging, such as thermal wave theory, excess carrier theory, piezoelectric coupling theory and magnetic coupling theory, are analyzed and summarized in detail. The applicable scope of the imaging mechanism is also pointed out. Shows the electronic imaging technology in metal materials, semiconductor materials and ceramic materials. Finally, the development trend of electronic imaging theory, technology and application is prospected.