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提出了一种通过纳秒脉冲激光器微加工制作的杂化准微金字塔型结构,与未经处理的均匀准微金字塔型结构相比,平均反射率下降了15%。通过实验,系统研究了激光能量密度、脉冲个数和图案间距对反射性能的影响。结果表明,反射率随图案间距的增加而增加,随着脉冲数增加而减少,当激光能量密度在4.83J/cm2时获得最小反射。这种技术用具有普通纵横比的微杂化结构替代高纵横比的非杂化结构,获得宽带抗反射性能,成本更低。通过优化激光加工参数能获得较高的抗反射性能。
A hybrid quasi-pyramidal structure fabricated by nanosecond pulsed laser micromachining was proposed. The average reflectance decreased by 15% compared with the untreated homogeneous quasi-pyramidal structure. Through experiments, the effects of laser energy density, pulse number and pattern spacing on the reflection performance were systematically studied. The results show that the reflectivity increases with the increase of the pattern spacing and decreases with the increase of the number of pulses. The minimum reflectivity is obtained when the laser energy density is 4.83 J / cm2. This technique replaces high-aspect-ratio, nonhybridized structures with common aspect ratios of microgroped structures for broadband anti-reflection properties at a lower cost. By optimizing the laser processing parameters can get higher anti-reflection performance.