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电润湿器件的传统工艺中利用SU-8光刻胶材料制备像素墙,从而得到最小的显示单元——像素.文中通过实验发现另一种环氧树脂光刻胶(KMPR胶)可以代替传统的SU-8光刻胶用来制备电润湿器件的像素墙.KMPR胶既可以采用有机溶剂进行显影,也可以采用碱性显影液,更利于环保.通过对比有机溶剂(PGMEA)和碱性显影液(KOH溶液、四甲基氢氧化铵TMAH溶液)对KMPR光刻胶的显影效果,得到最佳水溶液显影液——氢氧化钾(KOH)显影液及其显影的较佳浓度范围,研究了温度对KMPR光刻胶显影的影响,进而对显影机理进行了探讨.
The traditional process of electrowetting device uses SU-8 photoresist material to prepare pixel wall, so as to get the smallest display unit - pixel.Through the experiment we found that another kind of epoxy resin photoresist (KMPR glue) can replace the traditional SU-8 photoresist is used to fabricate the pixel wall of electrowetting device.KMPR adhesive can be developed with organic solvent or alkaline developer, which is more environmentally friendly.Compared with organic solvent (PGMEA) and basic The development of KMPR photoresist by developing solution (KOH solution, tetramethylammonium hydroxide solution of TMAH) gave the best aqueous solution of potassium hydroxide (KOH) developing solution and the best developing range. The effect of temperature on the development of KMPR photoresist was discussed, and the development mechanism was discussed.