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本文介绍了一种不需感受器的用行波加热低电阻率半导体带材(方形或接近方形的)、或薄片(圆形或几乎是圆形的)的技术。相信这项技术在多达30个样品的同时均匀加热方面具有前景。加热器实际上是一段矩形波导,几何形状比较简单,其边界值可用适当公式表示。通过数值计算法解这个问题导出了作为各种有价值参量的函数的复传输常数值。理论研究表明,如果波导宽度选择合适,微波能量在样品中的吸收差不多是均匀的。在2.45 GHz 下,进行的衰减常数和电压驻波比的测量与理论预计很好地一致。用温度敏感漆对温度分布的初步测量与理论上是一致的。
This article describes a technique for heating low resistivity semiconductor tapes (square or near square), or sheets (round or nearly round) without the use of susceptors. It is believed that this technique has the prospect of homogenizing heat up to 30 samples simultaneously. Heater is actually a rectangular waveguide, the geometry is relatively simple, the boundary value can be expressed by an appropriate formula. Solving this problem numerically solves complex transfer constant values as a function of various valuable parameters. Theoretical studies have shown that if the waveguide width is chosen appropriately, the microwave energy absorption in the sample is about uniform. The measured attenuation constant and VSWR at 2.45 GHz are in good agreement with the theoretical prediction. The preliminary measurement of temperature distribution with temperature-sensitive paint is in agreement with the theory.