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本文介绍了超声切削用于薄膜电阻调整技术(简称超声调阻技术)的特点和原理,并就超声调阻工艺参数的选择和应用范围进行了讨论。
This paper introduces the characteristics and principle of ultrasonic cutting for thin film resistance adjustment technology (referred to as ultrasonic resistance adjustment technology), and discusses the selection and application range of ultrasonic resistance adjustment process parameters.