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采用绝缘层上Si(SOI)纳米线阵列波导光栅(AWG)结构设计了超紧凑光纤到户(FTTH)单纤三向滤波器。二维时域有限差分(2D-FDTD)模拟输出光场表明,3个波长光信号输出光场清晰,实现了1490 nm和1550nm下行波长的解复用和1310 nm波长的上传复用功能;进一步的输出功率模拟表明,当各波长信号输入功率为1 mW时,1490 nm端口输出功率为0.49 mW,1550 nm端口输出功率为0.49 mW,1310 nm上传信号功率为0.55 mW,相应的插入损耗分别约为-3.1、-3.1和-2.6 dB。各端口的串扰光功率可被抑制到-25.2 dBm以下,相应的串扰小于-22.6 dB。采用电子束(EB)光刻结合诱导耦合等离子干法(ICP-RIE)刻蚀,制备出了Si纳米线单纤三向滤波器,经红外CCD成像观察到器件具有3个波长的分波功能。
Ultra-compact fiber to the home (FTTH) single-fiber three-way filter was designed using an insulated Si (SOI) nanowire arrayed waveguide grating (AWG) structure. Two-dimensional finite-difference time-domain (2D-FDTD) analog output light field shows that the optical output of the three optical signals has a clear optical field, which enables the demultiplexing of the downlink wavelengths of 1490 nm and 1550 nm and the uplink multiplexing function of the wavelength of 1310 nm. The simulation results show that the output power of the 1490 nm port is 0.49 mW and the output power of the 1550 nm port is 0.49 mW and the power of the 1310 nm uplink signal is 0.55 mW when the input power of each wavelength signal is 1 mW. The corresponding insertion loss is about -3.1, -3.1 and -2.6 dB. The crosstalk optical power at each port can be suppressed below -25.2 dBm and the corresponding crosstalk is less than -22.6 dB. Si nanowire single-fiber three-way filter was fabricated by electron beam (EB) photolithography coupled with inductively coupled plasma-dry etching (ICP-RIE). The infrared wave CCD imaging showed that the device has a three-wavelength demultiplexing function .