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研究了一种微小型多通道径向平板阵列CO_2激光器的设计方案。该方案首次将稳定腔结构应用在多通道径向平板阵列结构的射频激励CO_2激光器中,腔型结构灵活,可根据实际需要进行参数选择。文中以三环复曲面结构为例,应用矩阵光学的相关理论对光束传输特性进行了分析和模拟。结果表明:在10kW,125MHz射频源激励,气体混合比例He:N_2:CO_2=3:1:1(添加5%的Xe),压强95torr的条件下,近场可获得24条光斑半径0.1cm左右的高斯光束,远场合并为一束。预计输出功率为1kW。该装置电极尺寸约为30cm×3cm×1cm(1×h×ω),总重量约为50kg。相对于其他腔体形状的多通道射频激励CO_2激光器,本方案为高斯光束输出,功率高、结构紧凑、体积小、重量轻、为实现CO_2激光器件的微小型高功率提供了一条新途径,具有重要的研究和应用价值。
The design scheme of a miniature multi-channel radial slab array CO_2 laser was studied. The scheme firstly applies the stable cavity structure to a radio-frequency excited CO 2 laser with a multi-channel radial flat array structure, and the cavity structure is flexible and the parameters can be selected according to actual needs. In this paper, taking the tricyclic toric structure as an example, the transmission characteristics of the beam are analyzed and simulated by using the theory of matrix optics. The results show that under the condition of 10kW and 125MHz RF excitation, the mixing ratio of gas: He: N_2: CO_2 = 3: 1: 1 (adding 5% Xe) and pressure of 95torr, Gaussian beam, far field combined into a bunch. The estimated output power is 1kW. The electrode size of the device is about 30 cm × 3 cm × 1 cm (1 × h × ω), and the total weight is about 50 kg. Compared with other cavity shape multi-channel radiofrequency CO_2 lasers, this scheme is a Gaussian beam output, high power, compact structure, small size and light weight, which provides a new way to realize the tiny high power of CO_2 laser device. Important research and application value.