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在MEMS静电执行器设计中,由于吸合效应的存在,导致微执行器调节范围受到限制。首先,对微执行器吸合效应产生的原因及其影响进行了分析与阐述。然后,针对吸合效应所带来的问题,给出了多种解决方法,以及与这些方法相关的技术进展。最后,对这些方法的性能及优缺点进行了总结。这些解决MEMS微执行器吸合效应的方法分为三种:利用反馈方法扩展执行器稳定范围;通过特殊的结构设计扩展执行器稳定范围;通过改变微执行器工作环境扩展执行器的稳定范围。通过对这三种方法的阐述,进一步加深了对吸合效应问题的理解,为今后的研究奠定了基础。
MEMS electrostatic actuator design, due to the presence of pull-in effect, resulting in micro-actuator adjustment range is limited. First of all, the reasons for the micro-actuator pull-in effect and its impact were analyzed and explained. Then, aiming at the problems brought by the pull-in effect, a variety of solutions are given, as well as the technical progress related to these methods. Finally, the performance, advantages and disadvantages of these methods are summarized. These methods to solve the MEMS micro-actuator pull-in effect are divided into three types: the use of feedback to extend the stability of the actuator range; through a special structural design to extend the stability of the actuator range; by changing the micro-actuator operating environment to extend the stability of the actuator range. Through the elaboration of these three methods, the understanding of the pull-in effect is further deepened, which lays the foundation for future research.