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CARBON NITRIDE FILMS PREPARED AT DIFFERENT N_2/Ar RATIOS BY CLOSED FIELD UNBALANCED REACTIVE MAGNETR
[期刊论文] 作者：A. Vyas,
来源：Acta Metallurgica Sinica(English Letters) 年份：2005
Carbon nitride (CNx) thin films have been deposited onto Si(100) (for structural and mechanical analyses) and M42 high-speed-steel (for tribological measurement...
CARBON NITRIDE FILMS PREPARED AT DIFFERENT N2/Ar RATIOS BY CLOSED FIELD UNBALANCED REACTIVE MAGNETRO
[期刊论文] 作者：A. Vyas,K.Y. Li,Z.F. Zhou,Y.G. Shen,
来源：金属学报（英文版） 年份：2005
Carbon nitride (CNx) thin films have been deposited onto Si(100) (for structural and mechanical analyses) and M42 high-speed-steel (for tribological measurement...
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