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Reactive DC Magnetron Sputter Deposited Titanium-Copper-Nitrogen Nano-Composite Thin Films with an A
[期刊论文] 作者：A.RAHMATI,H.BIDADI,K.AHMADI,F.HADIAN,,
来源：Plasma Science and Technology 年份：2004
A sintered Ti_(13)Cu_(87) target was sputtered by reactive direct current (DC) magnetronsputtering with a gas mixture of argon/nitrogen for different sputterin...
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