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High-density Plasma Generation with Microwave Propagation along Plasma-Sheath Interface and Its Appl
[会议论文] 作者：Hiroyuki.Kousaka,
来源：The 11th International Workshop on Plasma-Based Ion Implanta 年份：2011
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High-density Plasma Generation with Microwave Propagation along Plasma-Sheath Interface and Its Appl
[会议论文] 作者：Hiroyuki.Kousaka,
来源：The 11th International Workshop on Plasma-Based Ion Implanta 年份：2011
...
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