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[期刊论文] 作者：Bo-Wei Xie,Fa-Zhu Ding,Hong-Jing Shang,Da-Xing Huang,Tai-Guang Li,Qi Zou,Ji-Liang Zhang,Hong-Wei Gu,
来源：稀有金属（英文版） 年份：2021
A highly c-axis-oriented aluminum nitride (AlN)thin film with smooth and crack-free surface was fabricated by an off-normal direct current (DC) sputtering method in a pure nitrogen atmosphere,in which the rotatable substrate holder position......
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