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[期刊论文] 作者:Ke-Chang Han,Guo-Qiang Lin,Chuang Dong,Kai-Ping Tai,Xin Jiang,, 来源:Acta Metallurgica Sinica(English Letters) 年份:2017
To study the influence of the nitrogen vacancy(V_N)on mechanical and electrical properties of zirconium nitride deeply,Zr N_x films with different V_N concentra...
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