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[期刊论文] 作者:Sun Shilong Hao Qiuyan Zhao L, 来源:中国稀土学报:英文版 年份:2006
Oxygen precipitates in heavily Sb-doped silicon after rapid thermal process (RTP) in Ar ambient were investigated by RTP at high temperature following annealing...
[期刊论文] 作者:Sun Shilong,Hao Qiuyan,Zhao Li, 来源:稀土学报(英文版) 年份:2004
Oxygen precipitates in heavily Sb-doped silicon after rapid thermal process (RTP) in Ar ambient were investigated by RTP at high temperature following annealing...
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