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[期刊论文] 作者：T. Glinsner,B.Vratzov,C.Gourgon,S.Landis,P. Kettner,C. Schaefer,
来源：半导体技术 年份：2004
Nanoimprint Lithography has been demon-strated to be one of the most promising next genera-tion techniques for large-area structure replicationin the nanometer...
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