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[期刊论文] 作者：Lou Yan-Hui,Song Gui-Lin,Chang Fang-Gao,Wang Zhao-Kui,
来源：中国物理B（英文版） 年份：2010
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[期刊论文] 作者：Liao Ying-Jie,Lou Yan-Hui,Wang Zhao-Kui,Liao Liang-Sheng,
来源：中国物理B（英文版） 年份：2014
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[期刊论文] 作者：Wang Zhao-Kui,Lin Kui-Xun,Lou Yan-Hui,Lin Xuan-Ying,Zhu Zu-Song,
来源：中国物理（英文版） 年份：2006
For a better understanding of the deposition mechanism of thin films in SiCl4 source gas, we have measured the spatial distributions of SiCln (n=0-2) radicals i...
,A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass s
[期刊论文] 作者：Wang Zhao-Kui,Lin Kui-Xun,Lin Xuan-Ying,Qiu Gui-Ming,Zhu Zu-Song,
来源：中国物理（英文版） 年份：2005
A newly established movable sampling apparatus of mass spectrometer is used to measure the spatial distribution of depletion fraction of silane plasma. A straig...
,A Movable Mass Spectroscopy Sampling Apparatus for Measuring Spatial Distribution of Neutral Radica
[期刊论文] 作者：WANG Zhao-Kui,LIN Kui-Xun,LIN Xuan-Ying,QIU Gui-Ming,ZHU Zu-Song,
来源：中国物理快报（英文版） 年份：2005
A movable mass spectroscopy gas sampling apparatus has been established and a straight-line fit ofsilane depletion fraction f is proposed.The spatial density di...
[期刊论文] 作者：WANG Zhao-Kui,LIN Kui-Xun,LIN Xuan-Ying,LOU Yan-Hui,ZHU Zu-Song,
来源：中国物理快报（英文版） 年份：2006
Radicals produced by the plasma enhanced chemistry vapour deposition technique in SiCl4 plasma are identified by mass spectrometry using our newly proposed stra...
[期刊论文] 作者：HUANG Rui,LIN Xuan-Ying,YU Yun-Peng,LIN Kui-Xun,WEI Jun-Hong,YU Chu-Ying,WANG Zhao-Kui,
来源：中国物理快报（英文版） 年份：2004
We report the discovery of fast growth of polycrystalline silicon films under low temperature of 200-300 C from SiCl4/H2 mixture gases by plasma enhanced chemic...
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