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Surface removal of a copper thin film in an ultrathin water environment by a molecular dynamics stud
[期刊论文] 作者：Junqin SHI,Liang FANG,Kun SUN,Weixiang PENG,Juan GHEN,Meng ZHANG,
来源：摩擦（英文） 年份：2020
The surface planarity and asperity removal behavior on atomic scale in an ultrathin water environment were studied for a nanoscale process by molecular dynamics...
Stress Relaxation Behaviors of Monocrystalline Silicon Coated with Amorphous SiO2 Film:A Molecular D
[期刊论文] 作者：Juan Chen,Liang Fang,Meng Zhang,Weixiang Peng,Kun Sun,Jing Han,
来源：固体力学学报（英文版） 年份：2021
Long-lasting constant loading commonly exists in silicon-based microelectronic con-tact,as well as the chemical mechanical polishing area.In this work,the stress relaxation analysis of single crystal silicon coated with an amorphous SiO2 fi......
Stress Relaxation Behaviors of Monocrystalline Silicon Coated with Amorphous SiO_(2)Film:A Molecular
[期刊论文] 作者：Juan Chen,Liang Fang,Meng Zhang,Weixiang Peng,Kun Sun,Jing Han,
来源：固体力学学报:英文版 年份：2021
Long-lasting constant loading commonly exists in silicon-based microelectronic contact,as well as the chemical mechanical polishing area.In this work,the stress relaxation analysis of single crystal silicon coated with an amorphous SiO2 fil......
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