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Fluid simulation of pulse modulated RF capacitively coupled plasma sustained in mixtures of SiH4/O2/
[会议论文] 作者：Wenzhu Jia,Yuanhong Song,Younian Wang,
来源：13th Asia-Pacific Conference on Plasma Science and Technolog 年份：2016
Silicon oxide,silicon nitride,or silicon oxynitride thin films grown by plasma enhanced chemical vapor deposition (PECVD) have been widely used in the semiconductor devices or integrated circuits.In t...
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