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An analytical model of ion energy distribution and angular distribution in dual frequency capacitive
[会议论文] 作者：Zhen-Hua Bi,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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An analytical model of ion energy distribution and angular distribution in dual frequency capacitive
[会议论文] 作者：Zhen-Hua Bi,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
...
Mass spectrometer investigation of ion energy distribution in dual frequency capacitively coupled ar
[会议论文] 作者：Xiang-Zhan Jiang,Yong-Xin Liu,Zhen-Hua Bi,Wen-Qi Lu,You-Nian Wang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
In this paper,an energy resolved quadruple mass spectrometer is adopted to investigation ion energy distribution (IED) impinging on the ground electrode in dual frequency capacitively coupled argon-ox...
,Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures an
[期刊论文] 作者：Zhen-Hua Bi,Yi Hong,Guang-Jiu Lei,Shuai Wang,You-Nian Wang,Dong-Ping Liu,
来源：中国物理B（英文版） 年份：2017
A high-density RF ion source is an essential part of a neutral beam injector.In this study,the authors attempt to retrofit an original regular RF ion source rea...
,One-dimensional hybrid simulation of the electrical asymmetry effect caused by the fourth-order har
[期刊论文] 作者：Shuai Wang,Hai-Feng Long,Zhen-Hua Bi,Wei Jiang,Xiang Xu,You-Nian Wang,
来源：中国物理B（英文版） 年份：2016
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