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A novel three-component hybrid-integrated optical accelerometer based on LiNbO3 photoelastic waveguide is presented. The......
对应用混合集成技术制作的二轴振动传感器特点,确定了传感器制作的关键工艺,设计了关键工艺路线.制作的传感器通过了振动、冲击、......