The design of a small complex-type focussed magnetron with a long target-life used for excited multi-atoms beam film dep......

介绍了将激光驻波聚焦原子束技术用于制作纳米级图形的基本原理和实验系统设计.研究了驻波透镜对原子束的聚焦特性及像差,数值结果......