RPEALD相关论文
Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatm
该文从挂篮荷载计算、施工流程、支座及临时固结施工、挂篮安装及试验、合拢段施工、模板制作安装、钢筋安装、混凝土的浇筑及养生......
Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatm
High quality gallium oxide(Ga2O3) thin films are deposited by remote plasma-enhanced atomic layer deposition(RPEALD) wit......
