论文部分内容阅读
Effect of Sputtering Time on Nanomechanical Properties of TiO2 Films Prepared by Magnetron Sputterin
【机 构】
:
College of Science, Northeast Forestry University, Harbin, China
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年3期
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