【摘 要】
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Metal-organic chemical vapor deposition (MOCVD) equipment is one of the most important equipment for LED production.In recent years,homemade MOCVD equipment is urged to develop from industry field due
【机 构】
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Guangdong RealFaith Semiconductor Equipment Co.,Ltd.
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Metal-organic chemical vapor deposition (MOCVD) equipment is one of the most important equipment for LED production.In recent years,homemade MOCVD equipment is urged to develop from industry field due to the rapid development and bright expectancy of LED Lighting market in China.In this report,we present the key technology and development of RealFaith MOCVD system.The multi-physics simulation tools are used to design and optimize the Buffer Distributed Spray (BDS) MOCVD reactor,heating system,etc.Furthermore,we present the transmission electron microscopy (TEM),secondary ion mass spectroscopy (SIMS),X-ray diffraction (XRD) and photoluminescence mapping (PL) tests results to evaluate the quality of the LED epitaxial layers and the performance of the MOCVD system with BDS reactor.The results show the MOCVD system is of high performance for LED production,especially in the uniformity of wavelength,sharp interfaces in the MQWs structure and growth repeatability.The application and industrialization of homemade MOCVD equipment will inject new vitality for China Solid-State lighting’s development.
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