Fabrication and characteristics of WZO/IWO TCO thin films grown via electron beam deposition

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：simon_sx

【摘要】

：

Tungsten-doped zinc oxide (ZnO∶W,i.e.WZO) and tungsten-doped indium oxide (In2O3∶W,i.e.IWO) thin films are promising transparent conductive oxide (TCO) layers for thin film solar cells.

【作者】

：

Xue-lian Chen Xin-liang Chen

【机构】

：

Institute of Photo-electronic Thin Film Devices and Technology & Tianjin Key laboratory of Photo-ele

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Electron beam deposition ZnO:W (WZO) thin films electrical and optical propertie

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Tungsten-doped zinc oxide (ZnO∶W,i.e.WZO) and tungsten-doped indium oxide (In2O3∶W,i.e.IWO) thin films are promising transparent conductive oxide (TCO) layers for thin film solar cells.

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Fabrication and characteristics of WZO/IWO TCO thin films grown via electron beam deposition

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