Axial uniformity of diamond-like carbon film deposited by multi-cavity coupling microwave surface-wa

来源 :13th Asia-Pacific Conference on Plasma Science and Technolog | 被引量 : 0次 | 上传用户:cxg1112
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  Recently,diamond-like carbon(DLC) films have been widely used in food packaging for attractive gas barrier properties[1].In this paper,DLC films were deposited by a novel home-made microwave surface-wave multi-cavity coupling device with the method of chemical vapor deposition (CVD).The variable proportions of mixed Ar and C2H2 was investigated in detail.Optical emission spectroscopy (OES) was used to assess the Ar gas simultaneous discharge parameters in all four chambers.
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