论文部分内容阅读
Electrical and optical properties of ZnO:Al and ZnAl2O4 films grown by atomic layer deposition
【机 构】
：
Division of Silicon Photonic and Energy Storage Devices,School of Physics,Nankai University,Weijin R
【出 处】
：
第一届国际ALD应用大会暨第二届中国ALD学术交流会
【发表日期】
：
2012年4期
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