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Characterization of Pulsed Argon, Nitrogen, and Oxygen Plasmas in 450 mm Large-Area Inductive Discha
【机 构】
:
Low-TemperaturePlasmaLaboratory,DepartmentofPhysics,KoreaAdvancedInstituteofScienceandTechnology,373
【出 处】
:
9th Asia-Pacific Conference on Plasma Science and Technology
【发表日期】
:
2008年10期
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