In this paper we report our 640×512 InGaAs/InP focal plane array with response extended to visible wavelength band.We have fabricated a 640×512 pixel InGaAs/InP focal plane array,which consists of a backside-illuminated InGaAs/InP detector bump bonded to a silicon read out integrated circuit with a 25 μm pixel pitch.After removing the InP substrate,the response of the focal plane array has covered the wavelength band from 400nm to 1700nm.Quantum efficiency is approximately 16%at 500nm,54%at 850nm,91%at 1550nm.The influence of substrate removal process on the performance of the focal plane array has been analyzed.To reduce the reflection from the surface of the array,wide-band antireflection multilayer structures have been designed and simulated.With the deposition of the optimized antireflection coating,the response of the InGaAs/InP focal plane array has been improved for the visible light,as well as the short-wavelength infrared.This focal plane array is suitable for man-portable and night vision applications.