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Nucleation of Nanostructured Silver Layer by Magnetron Sputtering in Ar/N2 Plasma
【作 者】
:
【机 构】
:
Institute of Physics,Academy of Sciences of the Czech Republic,Na Slovance 2,182 21 Prague 8,Czech R
【出 处】
:
The 8th Asian-European International Conference on Plasma Su
【发表日期】
:
2011年1期
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