Problems of aspheric surface measurement using capacitive probes

来源 :2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议 | 被引量 : 0次 | 上传用户：shkarenwang

【摘要】

：

【作者】

：

X.Tao D.Yuan S.Li

【机构】

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Institute of Machinery Manufacturing Technology,China Academic of Engineering Physics China

【出处】

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2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议

【发表日期】

：

2016年5期

【关键词】

：

Aspheric surface measurement Non-contact Capacitive probe Error compensation

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　　With the wide application of the asphere in all fields,high precision and high efficiency aspheric surface detection technology has become a hot research topic.This paper submits a new method of non-contact measurement of aspheric surface based on the capacitive probe.Taking the eccentric spherical surface as the object of study,the average effect of capacitive probe measurement and the influence of tilting the capacitive probe on the measurement results are studied.

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Problems of aspheric surface measurement using capacitive probes

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