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Hybrid polymer-metal film is the important component of the surface plasmon polariton(SPP)waveguides and the hyperbolic waveguides which have been the research focuses in the field of integrated optics.In this paper,the fabrication processes of the polymer film were optimized in order to achieve high performance nano-metal films.Lots of polymer films were fabricated and characterized including thickness,uniformity of refractive index and roughness to obtain the optimal parameters of fabrication processes.Using the optimized processes,a SPP waveguide based on the hybrid polymer-metal film with low uniformity of refractive index and roughness was fabricated,and its optical characteristics were experimentally studied.