A nano-thickness silicon oxide coating is deposited on 1.25 m in width,12 μm in thickness of the plastic web surface by magnetized plasma at ambient temperature.We use hexamethyldisiloxane as precursor of Si source and pure oxygen as oxide gas to deposit the nano-scale silicon oxide coating in roll-to roll process,which is performed at over 1000 nm/min of silicon oxide deposition rate and 100 m/min of the web speed.