【摘 要】
：
Lateral shearing interference detection is a economically efficient method which is used to the online testing process of aspheric surface.Whereas,when shea
【机 构】
：
Xi'an Technological University,China
【出 处】
：
2014年光子与光学工程国际会议暨西部光子学学术会议
论文部分内容阅读
Lateral shearing interference detection is a economically efficient method which is used to the online testing process of aspheric surface.Whereas,when shear plate is used in lateral shearing interference to detect large aperture aspherical surface,the real moving shear plate can produce shearing error,which brings error into the two-dimensional wavefront reconstruction of aspheric surface.So,for shearing error,Zernike polynomial fitting method is used to study shearing displacement error on the influence of twodimensional wavefront information reconstruction by computer simulation.For the same measured non-spherical surface,different shearing displacement error influences on the precision of wavefront reconstruction are compared by computer simulation,and finally build the corresponding relations between wave information integrity and shearing displacement error.
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