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Zn (Co, Ga) semi-polar crystalline thin films with (10 (1)1)growth orientation have been successfully grown on glass substrates by pulsed laser deposition(PLD) without the mechanism of epitaxy.The substrates temperature was kept at 500 ℃, while the oxygen pressure was varied in the range of 0.02Pa to 45Pa.The oxygen pressure was investigated having significant effects on the structural, optical and electrical properties of the Zn(Co,Ga)O films.