Formation And Physical Property Of Nanocrystals Of Ni Silicides Grown At Different Conditions

来源 :2015台湾物理年会 | 被引量 : 0次 | 上传用户：lschx

【摘要】

：

　　Transition metal silicides serve as contacts and interconnects in semiconductor transistors where nickel silicides such as NiSi and NiSi2 has been intensive

【作者】

：

Syuan-LingYe;Pei-WenChen;Yi-ChiaChou;

【机构】

：

Department of Electrophysics,National Chiao Tung University,Hsinchu 300,Taiwan

【出处】

：

2015台湾物理年会

【发表日期】

：

2015年期

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　　Transition metal silicides serve as contacts and interconnects in semiconductor transistors where nickel silicides such as NiSi and NiSi2 has been intensively used in microelectronic devices.It can be formed via high temperature fabrication and presents different nanocrystals surface-morphology.

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Formation And Physical Property Of Nanocrystals Of Ni Silicides Grown At Different Conditions

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