A Study on the Mechanical Characteristic of Graphene Interconnectors on Silicon Thin Film Transistor

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:zhugege521
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The high electrical performance of thin film transistors (TFTs) needs to be insensitive to mechanical deformation.
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