论文部分内容阅读
Effect of Nitrogen Content on the Properties of CrNx Films Prepared by High Power Pulsed Unbalanced
【机 构】
:
School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian, China;Key
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年3期
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