【摘 要】
：
In precision optical surface measurement,phase-shifting interferometry is commonly used but restricted by the sensitivity of the environment.It is almost im
【机 构】
：
ShanghaiUniversity,ChinaZhengzhouUniversity(China)andShanghaiUniversity,China
【出 处】
：
2014年光子与光学工程国际会议暨西部光子学学术会议
论文部分内容阅读
In precision optical surface measurement,phase-shifting interferometry is commonly used but restricted by the sensitivity of the environment.It is almost impossible that we use phase-shifting interferometry for optical testing in workshop environment.In this situation dynamic interferometry is a good choice because of the insensitive of vibration.This paper will describe one dynamic interferometry utilizing spatial carrier and Fourier transform,representative of this method is DynaFiz interferometer in ZYGO Company,and discuss the accuracy of that interferometer in optical testing when phase-shifting interferometry is unable to complete the measurement.By a lot of experiments,some problems is analyzed,including the relationship between the measurement accuracy and systematic error,the test surface cleanliness,temperature,vibration measurement,the error restraint method is provided at the same time.It can provide a reference for the dynamic interferometry applications.
其他文献
The monolayer SiNx optical thin films were prepared by Plasma Enhanced Chemical Vapor Deposition(PECVD)technique on the BK7 glass substrate,the laser-induce
Laser polishing technique using thermal effect of the interaction of light with matter to achieve removal of material,it is a non-contact polishing techniqu
Spectrally resolved interferometry(SRI)technology is a high precision laser interferometry technology,whose short non-ambiguity range(NAR)increases the prec
As one of the core in lithography,the UV light source has a great influence on wavelength precision of the system.To meet the requirements of UV light sourc
To design an on-line diameter measurement system for Hot-rolled seamless steel tube production line.On one hand,it can play a stimulate part in the domestic
Band-pass filter as a core component of the infrared therapy device,plays a key role in treatment.By selectively filtering for the light of the infrared lig
There has been much recent interest in quantum technology for applications to high resolution imaging and interference measurement.Due to noise and photon l
Doppler asymmetric spatial heterodyne spectroscopy(DASH)is a new technology for measuring upper atmospheric winds by observing the Doppler shift of atmosphe
The paper will describe an automated subaperture stitching interferometry for large plano surface based on relevant algorithm,which restruct the whole surfa
A satellite laser communications network structure with two layers and multiple domains has been proposed,which performance has been simulated by OPENT.To s