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5. Study on the Plasma Density and Temperature of the DC-RF Plasma Source

Study on the Plasma Density and Temperature of the DC-RF Plasma Source

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：vivion1

【摘 要】

：

A radio frequency (RF) plasma flow has been investigated intensively for the material processing such as plasma spraying and fine particle treatment so far.

【作 者】

：

Ji-Hun Kim In-Je Kang Heon-Ju Lee 

【机 构】

：

Department of Nuclear & Energy Engineering, Jeju National University, 66 Jejudaehakno, Jeju, Republi

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

DC-RF Hybrid Plasma Plasma Temperature Plasma Density 

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A radio frequency (RF) plasma flow has been investigated intensively for the material processing such as plasma spraying and fine particle treatment so far.

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