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A Micro-electromechanical systems (MEMS) fluid viscosity sensor with variable cross-section cantilever structure was designed in this research.Due to the quality factor of cantilever under the torsional resonance is much higher than that under the first order flexural resonance,the fluid viscosity measuring accuracy under the torsional resonance is much higher.Then an exciting method named torsional excitation was presented when the direction of magnetic induction lines was rotated by 90 degree to be parallel with width of cantilever.It could drive the cantilever vibrating under torsional mode directly.The fluid viscosity measuring experiments were completed in seven kinds of alkanes,the results showed that this method can effectively improve the accuracy and stability for the fluid viscosity measurement.