Fabrication of Indium Tin Oxide film with controllable surface morphology via Oxygen participant ele

来源 :第十届中国国际半导体照明论坛 | 被引量 : 0次 | 上传用户：whwoicq123

【摘要】

：

【作者】

：

Yan Shen Xiaobo Hu Qing Liu Zhiyuan Zuo Mingsheng Xu Huan Liu Ying Wang Xiangang Xu Kai Jiang Muqing Zhang

【机构】

：

State Key Laboratory of Crystal Materials,Shandong University,Jinan 250100,P.R.China;Shandong Huagua

【出处】

：

第十届中国国际半导体照明论坛

【发表日期】

：

2013年8期

【关键词】

：

electron beam evaporation nanorod cellular particle grain cluster ITO film surfa

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　　The ITO film as the transparent conductive layer in gallium nitride based light emitting diodes (LEDs) can improve effectively current spreading and is widely applied.In this paper,ITO films with different morphologies have been obtained through different evaporation conditions.By adjusting oxygen flow in the process of evaporation,nanorod,cellular particle and grain cluster ITO structures had been obtained.Roughnesses of different ITO films were detected by AFM and the optical properties are analyzed by ultraviolet-visual spectrometer.The growth mechanisms of ITO films with different surface morphologies are also discussed.

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Fabrication of Indium Tin Oxide film with controllable surface morphology via Oxygen participant ele

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