【摘 要】
：
The indium tin oxide (ITO) thin films were deposited on glass substrates by DC magnetron sputtering system.The effects of substrate temperatures, DC power, sputtering pressure, and film thickness on t
【机 构】
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Bengbu Design & Research Institute for Glass Industry, Bengbu, Anhui 233018, P.R.China
【出 处】
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The 24th International Conference on Glass( ICG Congress 201
论文部分内容阅读
The indium tin oxide (ITO) thin films were deposited on glass substrates by DC magnetron sputtering system.The effects of substrate temperatures, DC power, sputtering pressure, and film thickness on the structural,morphological, electrical, and optical properties of ITO thin films were studied by X-ray diffractometer (XRD),scanning electronic microscope (SEM) , four-point probe system and UV-vis spectrometer respectively.
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