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The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technology.
The high power impulse magnetron sputtering (HiPIMS) discharge
【摘 要】
：
The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technology.
【机 构】
：
UM-SJTU Joint Institute, Shanghai Jiao Tong University, Shanghai, China;Science Institute, Universit
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
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