【摘 要】
：
The organization structure and properties of silver composite coatings were reviewed in this paper.Various preparation methods of aluminum oxide thin films
【机 构】
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Lanzhou Institute of Physics, CAST, China
【出 处】
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The 9th International Conference on Thin Film Physics and Ap
论文部分内容阅读
The organization structure and properties of silver composite coatings were reviewed in this paper.Various preparation methods of aluminum oxide thin films were systematically described, including but not limited to vacuum vapor deposition,DC reactive magnetron sputtering, radio frequency magnetron sputtering, and radio-,medium-and pulse-reaction magnetron sputtering, ion beam assisted deposition,pulsed laser deposition, plasma enhanced chemical vapor deposition, metal-organic chemical vapor deposition and sol-gel method, respectively.The advantages and disadvantages of these preparation methods were compared too.The new preparation technology of aluminum oxide thin films on flexible polyimide substrate was put forward.The current research and prospect of CCAg thin films were elaborated.
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