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Noble metals (Au and Ag) nanostructures have been prepared on p-GaP epitaxial layer via a wet chemical approach.The microstructural aspects of the nanoparticles are characterized by scanning electron microscopy (SEM),energy-dispersive X-ray (EDX) spectrum, X-ray photoelectron spectroscopy (XPS) spectra and UV-visible absorption spectrum.The Au nanoparticles can be obtained through direct chemical reaction with HAuCl4 aqueous solution.