论文部分内容阅读
Fourier transform infrared (FTIR) spectrophotometer is a powerful analytical tool for material characterization,environmental monitoring,pharmaceutical exploitation,point-of-care diagnostics,and so on.The state-of-art FTIR spectrometers are table-top instruments with unwanted considerable susceptibility to vibration and shock,and they are always used in laboratory and unsuitable for rapid on-site analysis.Owing to a large variety of applications,miniature Fourier transform spectrometers have attracted increasing interest from academic and industrial communities in the past decade.Rapid development of optical MEMS technology has led to implementation of miniature FTIR spectrometers based on millimeter-scale time-scanning Michelson interferometers.Such miniature FTIR spectrometers contain a movable MEMS mirror to change the optical pathlength difference (OPD),thereby still requiring an internal reference wavelength for accurate OPD measurement.Moreover,the MEMS mirror easily tilts during its large-range scanning,consequently impairing the interferogram and affecting the retrieved spectrum with the spectrometer.