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Epitaxial Reactor ClassificationEpi Reactor PE 3061D■ wafer quality comparable to SWR(application overlaps)■ CoO comparable tobatch reactors ■ thick film deposition capabilityEpi reactor PE 3061D :Wide Applications RangeThinfilms Epi applications.(Epi Layer:5u)New discrete generation (Epi Layer 20 to 80u)GBT devices.(Double Epi Layer up to 180u)ntegrated Circuitits