Plasmas generated at a moderate pressure level (e.g.,0.1~10 Torr,or 1~100 Torr),which are also defined as mesoplasmas,possess the advantages of both low-pressure cold plasmas and atmospheric-pressure thermal plasmas[1,2]with high processing rates and abundant chemically reactive species.In previous studies,an inductively coupled mesoplasma has been employed for the thin film production at a fixed pressure of 6 Torr[1].